Facility
- Full Access to Tianjin University M/NEMS LAB
- Cleanroom space: 800 m²
- Research staff team for cleanroom maintenance and students training
M/NEMS lab
- Fabrication Facilities (Lithography, Etching, Chemical vapor deposition, Metal evaporation, e-beam lithography etc.)
- Characterization Facilities (Microscopy, SEM, AFM etc.)
GAS Sensing
Biosensing
Materials Synthesis and Characterizations
Surface Coating and Analysis
Cell Line
